By Hubert Gnaser
The booklet provides an outline on very important features of ion irradiation of surfaces, emphasizing low impression energies. in particular, ion penetration and implantation into solids, disorder construction and amorphization of semiconductors, sputtering of elemental and multicomponent goals, and ionization methods of emitted species are mentioned. It offers a synoptic view of those phenomena that are strongly interrelated by way of an analogous easy strategies, yet are frequently defined individually and in diverging terminology. The publication attempts to bridge this hole, summarizing effects from experiments, desktop simulations and theoretical techniques.
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Extra resources for Low-Energy Ion Irradiation of Solid Surfaces
Example text
4 • 1016 ions/cm 2, more than 30 atomic layers are exposed, with a few deep, wide pits dominating the morphology. The regularity of the pit shape is now very pronounced; also, the remainders of almost completely removed layers tend to form adatom islands stacked onto each other. e. the pit formation, at high fluences can be explained by the low (and perhaps vanishing) probability for a vacancy to become filled by an atom originating in a different (that is, higher) layer. Thus, although the monovacancies are mobile within the layer of their formation (intralayer mass transport), they remain, at 625 K, within that layer (no interlayer mass transport).
47 nm). The simulations indicate that the core of the collision cascade is at temperatures above the melting point and at densities below those of solid or liquid Cu for an extended time interval. 8 ps. 4 ps. 87]. 5 ps because of the lattice conductivity of solid copper. 15eV above the kinetic energy. 135eV). 6ps (see the lowest panel in the right-hand column of Fig. 9), the atoms in the region of the cascade have almost cooled to the temperature of the surrounding atoms. Still, considerable bulk damage is observed which, to some extent, might anneal out during much longer time periods not accessible by the simulation.
132]: fewer atoms are ejected normal 42 2. Interaction of Low-Energy Ions with Solids to the surface and a larger fraction at oblique angles, as for the latter the reversal of the momentum from the incoming ion is more easily obtained. 133-140] to be over-cosine and can be described by cos~ ~0, where ~ is a fitting parameter. 0 have been reported, but in exceptional cases much larger numbers have been found. Possible explanations for the over-cosine emission have been based on surface-induced anisotropy of the recoil flux below the surface and/or anisotropic surface scattering of the flux passing through the surface.