By Vijay K. Varadan, K. J. Vinoy, S. Gopalakrishnan
Offering unified assurance of the layout and modeling of shrewdpermanent micro- and macrosystems, this ebook addresses fabrication matters and descriptions the demanding situations confronted via engineers operating with clever sensors in various functions.
half I offers with the basic strategies of a standard shrewdpermanent approach and its constituent elements. initial fabrication and characterization options are brought ahead of layout rules are mentioned intimately. half III provides a finished account of the modeling of clever structures, shrewdpermanent sensors and actuators. half IV builds upon the basic innovations to investigate fabrication ideas for silicon-based MEMS in additional aspect.
working towards engineers will enjoy the special review of purposes in communications expertise, aerospace, biomedical and mechanical engineering. The ebook presents an important reference or textbook for graduates following a direction in shrewdpermanent sensors, actuators and platforms.
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Extra info for Smart Material Systems and MEMS: Design and Development Methodologies
Sample text
Once they are molded in to their shape, usually by applying heat and pressure, these materials become very hard. This process of the polymer becoming an infusible and insoluble mass is called ‘curing’. Reheating such a thermosetting polymer just results in the degradation of the polymer and will distort the object made. Epoxy and phenol formaldehyde are some examples of thermosetting polymers. Depending upon their final use, polymers can be classified as plastic, elastomer, fiber or liquid resin.
However, in most instances a layer of metal is first deposited by a process known as metallization. Metallization is a process whereby metal films are formed on the surface of a substrate. These metallic films are used for interconnections, ohmic contacts, etc. Hence, their continuity, uniformity and surface properties are critical in the device performance. Metal films can be formed by using various methods, with the most important being physical vapor deposition (PVD). The latter is performed under vacuum by using either an evaporation or sputtering technique.
This is due to some outstanding properties that these nano-scale materials can offer over conventional bulk materials. One such nano-scale material is the carbon nanotube (CNT). From their unique electronic properties and thermal conductivities higher than diamond to mechanical properties where the stiffness, strength and resilience exceed any current material, carbon nanotubes offer tremendous opportunities for the development of fundamentally new material systems. In particular, the exceptional mechanical properties of carbon nanotubes, combined with their low density, offer much scope for the development of nanotube-reinforced composite materials.