Thin Film and Depth Profile Analysis by H. Oechsner (auth.), Professor Dr. Hans Oechsner (eds.)

By H. Oechsner (auth.), Professor Dr. Hans Oechsner (eds.)

The characterization of skinny movies and good interfaces in addition to the determina­ tion of focus profiles in skinny good layers is without doubt one of the fields which re­ quire a speedy move of the consequences from easy learn to technological applica­ tions and advancements. it's the advantage of the Dr. Wilhelm Heinrich and Else Heraeus-Stiftung to advertise any such move via organizing excessive average seminars in general held on the "Physikzentrum" in undesirable Honnef close to Bonn. the current e-book has been influenced by means of the sort of seminars assembling many of the invited audio system as co-authors. The editor appreciates the cooperation of his colleagues contributing to this booklet. H. Oechsner Kaiserslautern, April 1984 v Contents 1. creation. ByH. Oechsner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1. 1 requisites for skinny movie and In-Depth research . . . . . . . . . . . . . . . . . . . 1 1. 2 item and Outl i ne of the publication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 four References 2. the applying of Beam and Diffraction strategies to skinny movie and floor Micro-Analysis. by means of H. W. Werner (With 25 Fi gures) . . . . . . . . . . . . . . . . five 2. 1 easy methods to be certain Chemical buildings in fabric examine five 2. 2 chosen Analytical beneficial properties Used to figure out Chemical buildings nine 2. 2. 1 intensity Profi 1 ing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . nine nine a) harmful intensity Profiling b) Nondestructive tools for intensity and skinny movie research 15 19 2. 2. 2 Microspot research and point Imaging 2. three making a choice on actual buildings in fabric examine . . . . . . . . . . . . . . . 27 2. three. 1 X-Ray Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2. three. 2 X-Ray Double Crystal Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 2. 3.

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Lab. C. A. Viegers: J. Mat. Sci. W. Werner: Mikrochim. Acta (Vienna), Suppl. K. H. J. Bartels, H. Veenvliet: In Inst. Phys. Conf. Ser. No. J. Bartels, J. 72 H. Oechsner, E. Stumpe: Appl. Phys. 14, 43 (1977) 38 3. J. Mathieu With 13 Figures Over the last ten years analysis of very thin films has become increasingly important. 41-43, 142]. Analytical techniques for these submicron films can be classified according to the properties to which probes are most sensitive: a) b) c) d) elemental and chemical composition of thin films; composition and width of the interface; crystalline structure; surface morphology and microstructure.

Hovland: Appl. Phys. Lett. 30, 73 (1976); Proc. 7th Intern. Vac. Congr. and 3rd Intern. Conf. on Solid Surfaces (Vienna 1977), ed. by R. Dobrozemsky, F. P. Viehbock, and A. 41 R. Wechsung, F. Hillenkamp, R. Kaufmann, R. Nitsche, H. 1, ed. by O. J. W. Witmer: Spectrochem. A. Bisdom, S. Henstra, A. J. Heinen, S. Meier: Neth. J. Agric. Sci. W. Werner: Mikrochim. Acta (Vienna), Suppl. 45 F. El. Dorsey, B. Martin, B. Povh: Nucl. Instrum. Meth. M. Augustyniak, D. L. Brown: Nucl. Instrum. Meth. R. Wilde, M.

Other consequences of decreasing beam diameter are that with decreasing beam diameter and constant current density, the beam current decreases. Hence, the time necessary to obtain an elemental image with a given signal-to-noise ratio increases. For this 2If elements with higher ion yields were considered "curve crossing" would nevertheless occur, though at a much smaller beam diameter. 53,54]. Moreover, computers are necessary for data handling, image display and quantitative correction procedures.

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